Ultra-Precision Stacked XY Air Bearing Platform
The DOV-150-150-XY-MXXX is a compact, ultra-precision XY planar air bearing platform formed by stacking two OAV Profile Dovetail-Series Air Bearing Rail Guides in an orthogonal configuration. This architecture delivers coordinated planar motion with exceptional straightness, stiffness, and smoothness, making it ideal for applications where space efficiency and deterministic positioning are critical.
Each axis incorporates OAV’s porous graphite air bearing technology, providing uniform air distribution and true non-contact motion. Vacuum preloading actively constrains the bearings, resulting in high structural stiffness, excellent damping, and outstanding repeatability—without friction, backlash, or mechanical wear. The dovetail rail profile ensures inherent guidance stability and precise orthogonality between stacked axes.
Manufactured from premium aircraft-grade materials and finished to extreme flatness and linear accuracy, the DOV-150-150-XY-MXXX is factory-matched and aligned to preserve precision across the full travel range. The platform is delivered ready to install, requiring no field adjustment and maintaining performance over time with zero maintenance.
An integrated air-actuated locking brake function, achieved through controlled air bearing pre-tensioning, allows the stage to securely hold position when required—without introducing mechanical contact or compromising accuracy.
Clean, vibration-free, and maintenance-free, the DOV-150-150-XY-MXXX is ideally suited for precision optics, semiconductor processes, advanced metrology, and research systems requiring ultra-smooth planar motion.
Key Features
Stacked XY configuration using two DOV-150-150 dovetail air bearing rails
Porous graphite air bearings with uniform air distribution
Vacuum preload for high stiffness, stability, and repeatability
True non-contact, frictionless motion
Integrated air-actuated locking brake
Aircraft-grade materials with ultra-flat precision surfaces
Factory-aligned, turnkey, maintenance-free platform
Performance Note: Load, stiffness, flow rate, and moment values are based on testing at 60 PSI supply pressure. Actual performance may vary depending on shaft quality, mounting method, air supply stability, and application conditions.
Title | Specification |
Part # | DOV150150XY |
Input Pressure | 20 – 100 PSI (0.14 – 0.69 MPa) |
Local Straightness | .25 μm per 25 mm travel |
Maximum error | 2 μm per 1000 mm travel |
Flatness | .0005 mm or .00002 in |
Carriage Size | 150 mm x 150 mm |
Travel | 50 mm/100 mm/200 mm/300 mm or Custom Travel |
Guidebar Length | Custom |
Assembly Height | 110 mm |
Carriage Weight | 1.3 kg (2.9 lb)(Each) 2.6 kg (5.8 lb)(Both) |
Total Weight | 4.10 kg (9.8 lb)(100 mm travel) |
Z direction Load | 704 lb (3130 N) |
Y direction Load | 304 lb (1352 N) |
Air Flow | 17 NLPM |
Pitch | 285 lbs-in (32 N-m) |
Roll | 324 lbs-in (37 N-m) |
Yaw | 140 lbs-in (16 N-m) |
Y Stiffness | 670 N/μ |
Z Stiffness | 730 N/μ |
Encoder | 50 nanometers per count |
Ironless Motor | Peak force: 36 N Continuous: 10N |
Current | Peak: 3.1 A Continuous: 0.83 A |