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MULTI-AXIS PLATFORMS

Multi-Axis Air Bearing Platforms for Ultra-Precise Motion Systems

Stacked XY Ultra-Precision Air Bearing Platform

OAV Multi-Axis Platforms are engineered for coordinated, ultra-precise motion across multiple degrees of freedom. By integrating linear and rotary air bearing axes into fully assembled systems, OAV delivers turnkey XY, XYZ, XYθ, and custom multi-axis platforms with exceptional accuracy, stiffness, and smoothness.

Built on advanced porous graphite air bearing technology, these systems provide true non-contact motion with uniform air film distribution—eliminating friction, backlash, and mechanical wear. Combined with vacuum preloading and ironless direct-drive motors, each axis achieves maximum stability, nanometer-level positioning, and ultra-smooth motion performance.

Designed for immediate deployment, all components are fully integrated, factory-aligned, and optimized for real-world operation. OAV multi-axis platforms can be configured to meet specific travel ranges, payload capacities, and precision requirements—making them ideal for semiconductor, optics, metrology, and advanced research applications.

Typical Configurations

  • XY planar systems

  • XYZ positioning stages

  • XYθ platforms with integrated rotation

  • Multi-axis (XYZθ and beyond) motion systems

  • Fully custom engineered architectures

Why OAV

  • True non-contact air bearing motion

  • Vacuum-preloaded for maximum stability

  • Ironless motors (zero cogging)

  • Nanometer-level positioning accuracy

  • Turnkey, factory-aligned systems

  • Clean, quiet, maintenance-free operation

XY Precision Air Bearing Platform image
Ultra-Precision Stacked XY Air Bearing Platform

Ultra-Precision Stacked XY Air Bearing Platform

DOV-150-150-XY-MXXX

The DOV-150-150-XY-MXXX is a compact, ultra-precision XY planar air bearing platform formed by stacking two OAV Profile Dovetail-Series Air Bearing Rail Guides in an orthogonal configuration. This architecture delivers coordinated planar motion with exceptional straightness, stiffness, and smoothness, making it ideal for applications where space efficiency and deterministic positioning are critical.

Each axis incorporates OAV’s porous graphite air bearing technology, providing uniform air distribution and true non-contact motion. Vacuum preloading actively constrains the bearings, resulting in high structural stiffness, excellent damping, and outstanding repeatability—without friction, backlash, or mechanical wear. The dovetail rail profile ensures inherent guidance stability and precise orthogonality between stacked axes.

Manufactured from premium aircraft-grade materials and finished to extreme flatness and linear accuracy, the DOV-150-150-XY-MXXX is factory-matched and aligned to preserve precision across the full travel range. The platform is delivered ready to install, requiring no field adjustment and maintaining performance over time with zero maintenance.

An integrated air-actuated locking brake function, achieved through controlled air bearing pre-tensioning, allows the stage to securely hold position when required—without introducing mechanical contact or compromising accuracy.

Clean, vibration-free, and maintenance-free, the DOV-150-150-XY-MXXX is ideally suited for precision optics, semiconductor processes, advanced metrology, and research systems requiring ultra-smooth planar motion.

Key Features

Stacked XY configuration using two DOV-150-150 dovetail air bearing rails

Porous graphite air bearings with uniform air distribution

Vacuum preload for high stiffness, stability, and repeatability

True non-contact, frictionless motion

Integrated air-actuated locking brake

Aircraft-grade materials with ultra-flat precision surfaces

Factory-aligned, turnkey, maintenance-free platform

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