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Stacked XY Ultra-Precision Air Bearing Platform The DOV-150-150-XY-M100 is a compact, ultra-precision XY planar air bearing platform formed by stacking two OAV Profile Dovetail-Series Air Bearing Rail Guides in an orthogonal configuration. This architecture delivers coordinated planar motion with exceptional straightness, stiffness, and smoothness, making it ideal for applications where space efficiency and deterministic positioning are critical. Each axis incorporates OAV’s porous graphite air bearing technology, providing uniform air distribution and true non-contact motion. Vacuum preloading actively constrains the bearings, resulting in high structural stiffness, excellent damping, and outstanding repeatability—without friction, backlash, or mechanical wear. The dovetail rail profile ensures inherent guidance stability and precise orthogonality between stacked axes. Manufactured from premium aircraft-grade materials and finished to extreme flatness and linear accuracy, the DOV-1

MULTI-AXIS PLATFORMS

OAV’s Ultra-Precision Multi-Axis Platforms are engineered for applications requiring coordinated motion across multiple degrees of freedom. By combining linear and rotational air bearing axes into fully integrated systems, OAV delivers turnkey XY, XYZ, XYθ, XYZθ, and custom multi-axis platforms with uncompromising accuracy, stiffness, and smoothness.

Built from the highest-quality materials and manufactured to extreme tolerances, each platform is designed to preserve precision across all axes. OAV’s porous graphite air bearing technology provides uniform air distribution and true non-contact motion, while vacuum preloading actively constrains each axis for maximum stiffness, stability, and repeatability—without friction, backlash, or mechanical wear.

Motion is generated using ironless brushless motors for perfectly smooth, cog-free force and controlled by high-resolution encoders that deliver nanometer-level positioning accuracy. Motors, encoders, and air bearing components are fully integrated and factory-aligned to ensure optimal orthogonality, dynamic performance, and reliable out-of-the-box operation.

A modular system architecture supports XY, XYZ, XYθ, XYZθ, and fully custom configurations, allowing platforms to be tailored to specific travel ranges, payloads, accuracy requirements, and integration constraints. Clean, silent, and maintenance-free, OAV multi-axis platforms are trusted in environments where precision defines performance—from semiconductor manufacturing and optics to advanced metrology and research.


Typical Platform Configurations
• XY planar positioning platforms

• XYZ linear positioning platforms

• XYθ planar systems with integrated rotation

• XYZθ full multi-degree-of-freedom platforms

• Custom stacked linear and rotary architectures


Why OAV Multi-Axis Platforms
• True non-contact motion across all axes

• Porous graphite air bearings with vacuum preload

• Ironless brushless motors for ultra-smooth motion

• High-resolution encoders for nanometer-level control

• Premium materials and precision manufacturing

• Factory-aligned, turnkey, maintenance-free systems

Multi-Axis Platforms Installaton Guide
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Ultra-Precision Stacked XY Air Bearing Platform

Part # DOV-150-150-XY-M100

The DOV-150-150-XY-M100 is a compact, ultra-precision XY planar air bearing platform formed by stacking two OAV Profile Dovetail-Series Air Bearing Rail Guides in an orthogonal configuration. This architecture delivers coordinated planar motion with exceptional straightness, stiffness, and smoothness, making it ideal for applications where space efficiency and deterministic positioning are critical.

Each axis incorporates OAV’s porous graphite air bearing technology, providing uniform air distribution and true non-contact motion. Vacuum preloading actively constrains the bearings, resulting in high structural stiffness, excellent damping, and outstanding repeatability—without friction, backlash, or mechanical wear. The dovetail rail profile ensures inherent guidance stability and precise orthogonality between stacked axes.

Manufactured from premium aircraft-grade materials and finished to extreme flatness and linear accuracy, the DOV-150-150-XY-M100 is factory-matched and aligned to preserve precision across the full travel range. The platform is delivered ready to install, requiring no field adjustment and maintaining performance over time with zero maintenance.

An integrated air-actuated locking brake function, achieved through controlled air bearing pre-tensioning, allows the stage to securely hold position when required—without introducing mechanical contact or compromising accuracy.

Clean, vibration-free, and maintenance-free, the DOV-150-150-XY-M100 is ideally suited for precision optics, semiconductor processes, advanced metrology, and research systems requiring ultra-smooth planar motion.

Key Features

Stacked XY configuration using two DOV-150-150 dovetail air bearing rails

Porous graphite air bearings with uniform air distribution

Vacuum preload for high stiffness, stability, and repeatability

True non-contact, frictionless motion

Integrated air-actuated locking brake

Aircraft-grade materials with ultra-flat precision surfaces

Factory-aligned, turnkey, maintenance-free platform

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