The OAV Motorized Integrated T-Series Motion Solution combines OAV’s ultra-precision vacuum-preloaded linear air bearing technology with a fully integrated drive system to deliver a turnkey, frictionless motion platform. Designed for demanding metrology, optics, semiconductor, and research applications, this solution provides exceptional straightness, repeatability, and smoothness without mechanical contact.
Manufactured from premium aircraft-grade materials, the T-Series rail guide utilizes a porous graphite air bearing surface that simultaneously applies positive air pressure and vacuum preload. This dual-force design actively lifts the carriage while rigidly holding it down to the guide surface, achieving superior stiffness, stability, and vibration damping compared to conventional air bearing systems.
The integrated motor and drive components are precision-aligned at the factory, eliminating the need for complex customer integration while ensuring optimal performance. The result is a compact, clean, and maintenance-free linear motion solution capable of nanometer-level positioning when paired with appropriate feedback and control electronics.
Key Features
Vacuum-preloaded linear air bearing for zero friction, zero wear motion
Integrated motorized drive for a complete plug-and-play motion solution
Porous graphite bearing surface for uniform air distribution and stability
High stiffness and load capacity with exceptional straightness and smoothness
Non-contact operation eliminates backlash, stick-slip, and particulate generation
Ideal for precision positioning, scanning, and metrology applications
Title | Specification |
Motion | |
Part # | TS7575-M100 |
Input Pressure | 20 – 100 PSI (0.14 – 0.69 MPa) |
Flatness | .0005 mm or .00002 in |
Active Axes | X |
Travel | 100 mm/200 mm/300 mm or Custom |
Local Straightness | .25 μm per 25 mm travel |
Maximum error | 2 μm per 1000 mm travel |
Positioning | |
Encoder Resolution | 50 nanometers per count |
Integrated Sensor | Linear Enconder |
Mechanical | |
Carriage Size | 70 mm x 76 mm |
Assembly Height | 55 mm |
Guidebar Length | Custom |
Carriage Weight | .24 lb (.11 kg) |
Total Weight (100 mm travel) | 1.59 lb (.63 kg) 100 mm travel |
Z-axis load capacity | 90 lb (400 N) |
Y-axis load capacity | 20 lb (88 N) |
Pitch | 11 N-m |
Roll | 19 N-m |
Yaw | 33 N-m |
Y Stiffness | 28 N/μ |
Z Stiffness | 30 N/μ |
Ironless Motor | Peak force: 36 N Continuous: 10N |
Pneumatic | |
Air Flow | 17 nlpm |
Parameter | Motor 1 | Motor 2 | Motor 3 |
Continuous force | 2.9 N | 5.8 N | 8.7 N |
Peak force | 5.6 N | 11.2 N | 16.8 N |
Maxiumum Speed | 62 m/s | 29 m/s | 18 m/s |
Continuous current, RMS | 2.29 A | 2.29 A | 2.29 A |
Peak current, RMS | 4.44 A | 4.44 A | 4.44 A |
Force constant | 1.26 N/A | 2.52 N/A | 3.78 N/A |
Motor constant | 0.92 N/√W | 1.86 N/√W | 2.81 N/√W |
Back EMF, ph-ph | 1.03 V·s/m | 2.06 V·s/m | 3.09 V·s/m |
Resistance per phase | 0.58 Ω | 1.14 Ω | 1.70 Ω |
Inductance per phase | 12.9 μH | 25.8 μH | 38.7 μH |
Continuous power loss | 11.7 W | 23.4 W | 35.0 W |
Thermal resistance | 6.85 K/W | 3.43 K/W | 2.28 K/W |
Coil weight | 4.7 kg | 10 kg | 15 kg |
Coil Length | 17.5 mm | 34.3 mm | 51.1 mm |